PROJECTS OF CALL 6 (2013)

CA114 - WiCon
ENDED

CA116 - CORTIF
ENDED

CA118 - FITNESS
ENDED

CA208 - MobiTrust
ENDED

CT217 - RESIST
ENDED

CT218 - E450LMDAP
ENDED

The overall goal of the E450LMDAP project is to develop 450 mm lithography and metrology modules and tools and to initiate distributed pilot line activities over the 450 mm lithography and metrology tool platform eco system. These pilot line activities will complement the activities from the already initiated ENIAC JU E450EDL project. In addition, also early 450 mm wafer 1x node advanced patter...
 
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